Knowledge in mems

MICROELECTROMECHANICAL SYSTEMS - MEMS

Microelectromechanical systems (MEMS), also written as micro-electro-mechanical systems (or microelectronic and microelectromechanical systems) and the related micro mechatronics and microsystems constitute the technology of microscopic devices, particularly those with moving parts. They merge at the nanoscale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines in Japan and microsystem technology (MST) in Europe.

MEMS & MICRO SYSTEMS UNIT-1 NOTES

THIS PDF CONSISTS OF INTRODUCTION OF MEMS AND MICRO SYSTEMS,ESTABLISHED MEMS APPLICATIONS,PIEZO ELECTRICITY & APPLICATIONS

MEMS & MICRO SYSTEMS UNIT-2 NOTES

THIS PDF EXPLAINS ABOUT THIN FILM EVAPORATION'S,RESISTANCE HEATED EVAPORATION,INDUCTIVELY HEATED EVAPORATION,ELECTRON BEAM EVAPORATION,MICRO STEREO LITHOGRAPHY PROCESS & ITS TYPES.

MEMS & MICRO SYSTEMS UNIT-3 NOTES

THIS PDF EXPLAINS ABOUT MEMS TRANSDUCERS,MICRO SENSORS,MICRO ACTUATORS.

MEMS & MICRO SYSTEMS UNIT-4 NOTES

THIS PDF EXPLAINS ABOUT MEMS ACCELEROMETER & TYPES.

BASICS OF MEMS NOTES PDF

THIS PDF EXPLAINS ABOUT BASICS OF MEMS & SENSORS,ETCHING OF ELECTRONIC MATERIALS.