MICROELECTROMECHANICAL SYSTEMS - MEMS
Microelectromechanical systems (MEMS), also written as micro-electro-mechanical systems (or microelectronic and microelectromechanical systems) and the related micro mechatronics and microsystems constitute the technology of microscopic devices, part...See more
icularly those with moving parts. They merge at the nanoscale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines in Japan and microsystem technology (MST) in Europe.
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