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mems MICRO SYSTEMS

MEMS & MICRO SYSTEMS UNIT-2 NOTES

THIS PDF EXPLAINS ABOUT THIN FILM EVAPORATION'S,RESISTANCE HEATED EVAPORATION,INDUCTIVELY HEATED EVAPORATION,ELECTRON BEAM EVAPORATION,MICRO STEREO LITHOGRAPHY PROCESS & ITS TYPES.

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MEMS 2nd unit ...pdf

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VENKAT REVANTH PADUCHURI

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